Quartz Guided Infrared Heater is successfully integrated into 4 axis manipulator for MBE application.
The integration was done by CreaTec in Germany for a requirement of rapid heating upto 1,000ºC, heating in gas environment (i.e. O2) and high precision manipulation (upto 4 axis) in UHV chamber.
The Thermo Riko's Quartz Guided infrared heater is mounted on a high precision XYZ stage with a long Quartz rod (approx. 1m lonog) and heating the sample from backside to allow deposition on the front surface of the sample at underside.
|Sample Holder Design||as specified|
|Sample size||as specified|
|Heating System||1kW or 2kW infrared buld|
|Thermocouple||Type K, Type C or Type R|
|Temperature range||up to 1,000ºC|
|Flange size||DN 63, 100, 160 or 200CF|
|Axis||up to 4 axis
X, Y: up to ±25mm
Z: up to 600mm
Azimuthal rotation: continuous
|Mounting Orientation||Vertical or Inverted|
|Pressure Range||Ambient to 10-11 mbar|
|UHV Length||as specified|
For the full details, please visit the CreaTec website by clicking the below CreaTec logo.