Quartz Guided Infrared Heater is successfully integrated into 4 axis manipulator for MBE application.
The integration was done by CreaTec in Germany for a requirement of rapid heating upto 1,000ºC, heating in gas environment (i.e. O2) and high precision manipulation (upto 4 axis) in UHV chamber.
The Thermo Riko's Quartz Guided infrared heater is mounted on a high precision XYZ stage with a long Quartz rod (approx. 1m lonog) and heating the sample from backside to allow deposition on the front surface of the sample at underside.
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Specification
| Type | MA |
|---|---|
| Sample Holder Design | as specified |
| Sample size | as specified |
| Heating System | 1kW or 2kW infrared buld |
| Thermocouple | Type K, Type C or Type R |
| Temperature range | up to 1,000ºC |
| Bake-out temperature | 200ºC |
| Flange size | DN 63, 100, 160 or 200CF |
| Axis | up to 4 axis X, Y: up to ±25mm Z: up to 600mm Azimuthal rotation: continuous |
| Mounting Orientation | Vertical or Inverted |
| Pressure Range | Ambient to 10-11 mbar |
| UHV Length | as specified |
For the full details, please visit the CreaTec website by clicking the below CreaTec logo.
