GVH Series - UHV Heater

GVL298 Heating OnThermo Riko's patented GVH True UHV infrared heaters are using a specially designed an Infrared Lamp to emit mainly NIR (near infrared) region of infrared wavelength. Gold coated spheroid reflectors are precisely manufactured to focus the NIR wavelength efficiently and introduce the wavelength to the top of the Quartz rod. The Quartz rod transferes the NIR wavelength with minimal loss of wavelength towards the substrate surface.

Features (GVH298)

  • Max temprature: 1,400°C
  • Heating speed: 1°C/sec max.
  • Rapid heating comparing with resistive heater
  • Vacuum Seal: Sapphire viewing port
  • Ultimate pressure: 5 x 10-11 mbar
  • Typical working distance: < 5mm to the substrate surface
  • Cooling : water and air
  • Cooling water requirement:  filtered water recommended
  • Heating substrate region only
  • No contamination from atmospheric heat source
  • Programmable controller allows flexible control of the temperature and time
  • Low power consumption, 1kW and 2kW model
  • Can be used with any gases (i.e. Oxygen)
  • Mounting Flange: CF35 (2-3/4"/70mm OD flange)

GVL298 Dimensions

Configuration (Typical)

  • Infrared Guide Section: IG298
  • Vacuum Flange: VL21
  • Infrared guide rod: GRL100
  • Linear shift device: SD25
  • Temperature Controller: TP910RF
  • Flow switch: DFS3


Model Total Length L
GVH198 495 ~ 520 390 105 ~ 130
GVH298 622 ~ 672 470 152 ~ 202